Detail publikace
MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY
ŠRÁMEK, J. JANKOVÝCH, R.
Anglický název
MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY
Typ
Článek WoS
Jazyk
en
Originální abstrakt
This paper deals with the determination of uncertainty and individual contributions to the measurement uncertainty on the CMM SIOS NNM-1 instrument fitted with the touch-probe scanning system Gannen XP. Manufacturer SIOS designates this machine as nano-CMM. Two non-simulation methods to determine the measurement uncertainty, the substitution and multi-position methods are addressed in detail [Sramek, Jankovych 2018]. Ruby balls with various nominal diameters are used as the measured objects. One simulation method to determine the measurement uncertainty, the Monte Carlo method, is also addressed in this paper. The paper also summarizes and specifies calculation methods to determine the measurement uncertainty, and provides results of representative sets of measurements, including determination of the expanded measurement uncertainty. This paper contains novel conclusions in the area of uncertainty measurement of nano-CMMs.
Klíčová slova anglicky
accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball
Vydáno
2019-10-01
Nakladatel
Modern Machinery (MM) Science Journal
Místo
ČR
ISSN
1805-0476
Časopis
MM Science Journal
Ročník
Oct 2019
Číslo
3
Strany od–do
2998–3004
Počet stran
6
BIBTEX
@article{BUT162066,
author="Jan {Šrámek} and Róbert {Jankových}",
title="MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY",
journal="MM Science Journal",
year="2019",
volume="Oct 2019",
number="3",
pages="2998--3004",
doi="10.17973/MMSJ.2019\{_}10\{_}2018112",
issn="1803-1269",
url="https://www.mmscience.eu/journal/issues/October%202019/articles/measurement-uncertainty-simulation-by-monte-carlo-method-in-nanometrology"
}