Detail publikace

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

PAN, S. CHEN, K. VĚCHET, S.

Anglický název

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy

Klíčová slova anglicky

active stage; rubber bearing; flexible structure; vibration suppression; image inspection

Vydáno

2022-12-07

Místo

Pilsen

ISBN

978-1-6654-1040-3

Kniha

2022 20th International Conference on Mechatronics – Mechatronika (ME)

Strany od–do

1–6

Počet stran

6

BIBTEX


@inproceedings{BUT182474,
  author="PAN, S., CHEN, K. and VĚCHET, S.",
  title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
  booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
  year="2022",
  pages="1--6",
  address="Pilsen",
  doi="10.1109/ME54704.2022.9982985",
  isbn="978-1-6654-1040-3",
  url="https://ieeexplore.ieee.org/document/9982985"
}