Detail publikace

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D.

Anglický název

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.

Klíčová slova anglicky

non-uniform thin films, imaging spectroscopic reflectometry

Vydáno

2009-09-11

Nakladatel

IMEKO

Místo

Lisabon

ISBN

978-963-88410-0-1

Kniha

Proceedings of IMEKO 2009

Strany od–do

100–105

Počet stran

6

BIBTEX


@inproceedings{BUT32157,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas}",
  title="PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY",
  booktitle="Proceedings of IMEKO 2009",
  year="2009",
  pages="100--105",
  publisher="IMEKO",
  address="Lisabon",
  isbn="978-963-88410-0-1"
}