Detail publikace

Experimental Device for Electron Beam Micromachining

DUPÁK, L. ZOBAČ, M. DUPÁK, J. VLČEK, I.

Anglický název

Experimental Device for Electron Beam Micromachining

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

The paper describes experimental device for electron beam micromachining as well as some experiments. The device itself is derived from electron beam welding machine SES-1 developed at ISI Brno. Using this device, several types of materials as steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 um in diameter, thickness of 0.7 mm).

Klíčová slova anglicky

quartz glass drilling

Vydáno

2006-01-01

ISSN

0861-4717

Časopis

Elektrotechnica & Elektronica

Ročník

41

Číslo

5-6

Strany od–do

272–275

BIBTEX


@inproceedings{BUT34459,
  author="Libor {Dupák} and Martin {Zobač} and Jan {Dupák} and Ivan {Vlček}",
  title="Experimental Device for Electron Beam Micromachining",
  year="2006",
  journal="Elektrotechnica & Elektronica",
  volume="41",
  number="5-6",
  pages="272--275",
  issn="0861-4717"
}