Detail publikace

New method for the complete analysis of thin films non-uniform in optical parameters

OHLÍDAL, M. OHLÍDAL, I. FRANTA, D. ČUDEK, V.

Anglický název

New method for the complete analysis of thin films non-uniform in optical parameters

Typ

Abstrakt

Jazyk

en

Originální abstrakt

New method enabling us to perform the complete optical analysis of non-absorbing and weakly absorbing thin films non-uniform in thickness and optical constants is presented. This method is based on interpreting the spectral dependences of the reflectance measured for a sufficient number of points forming a matrix in the mean planes of the boundaries of the film analyzed.

Vydáno

2002-10-01

Nakladatel

The University of Tokyo, JApan

Místo

Tokyo

Kniha

Asia-Pacific Surface & Interface Analysis Conference

Strany od–do

181–

Počet stran

1

BIBTEX


@misc{BUT60151,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Daniel {Franta} and Vladimír {Čudek}",
  title="New method for the complete analysis of thin films non-uniform in optical parameters",
  booktitle="Asia-Pacific Surface & Interface Analysis Conference",
  year="2002",
  pages="1",
  publisher="The University of Tokyo, JApan",
  address="Tokyo",
  note="Abstract"
}