Detail publikace

Estimation of mechanical properties of thin Al surface layer

PETRÁČKOVÁ, K. KUBĚNA, I. TRUHLÁŘ, M. NÁHLÍK, L. KRUML, T.

Anglický název

Estimation of mechanical properties of thin Al surface layer

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Klíčová slova anglicky

microcompression, thin film properties, focused ion beam, FEM modelling

Vydáno

2012-04-16

ISBN

978-80-261-0097-3

Kniha

14th International Conference Applied Mechanics 2012

Strany od–do

117–120

Počet stran

4

BIBTEX


@inproceedings{BUT97123,
  author="Klára {Petráčková} and Ivo {Kuběna} and Michal {Truhlář} and Luboš {Náhlík} and Tomáš {Kruml}",
  title="Estimation of mechanical properties of thin Al surface layer",
  booktitle="14th International Conference Applied Mechanics 2012",
  year="2012",
  pages="117--120",
  isbn="978-80-261-0097-3"
}