Detail publikace

Surface profilometry by a holographic confocal microscopy

CHMELÍK, R. LOVICAR, L. HARNA, Z.

Anglický název

Surface profilometry by a holographic confocal microscopy

Typ

Článek recenzovaný mimo WoS a Scopus

Jazyk

en

Originální abstrakt

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be converted into the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth discrimination property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Klíčová slova anglicky

holography applications; profilometry; confocal microscopy.

Vydáno

2003-01-01

ISSN

0078-5466

Časopis

OPTICA APPLICATA

Ročník

33

Číslo

2-3

Strany od–do

381–

Počet stran

9

BIBTEX


@article{BUT41935,
  author="Radim {Chmelík} and Luděk {Lovicar} and Zdeněk {Harna}",
  title="Surface profilometry by a holographic confocal microscopy",
  journal="OPTICA APPLICATA",
  year="2003",
  volume="33",
  number="2-3",
  pages="9",
  issn="0078-5466"
}