Detail publikace

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

MÜLLEROVÁ, I. KONVALINA I.

Anglický název

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

Typ

Článek recenzovaný mimo WoS a Scopus

Jazyk

en

Originální abstrakt

The final image contrast in the scanning electron microscope (SEM) is not only a product of the interaction of primary electrons with the target, but the collection efficiency of the detector with its energy and angular distributions, as well as any subsequent signal processing, also play a role. In order to arrive at high signal-to-noise ratio, as many signal species should be caught as possible, though achieving a high contrast might require the selection of only a small part of the emission spectra. Multi-channel parallel detectors are promising in this respect.

Klíčová slova anglicky

multi-channel detector, angular distribution, low energy electron microscope

Vydáno

2006-07-30

ISSN

1431-9276

Časopis

MICROSCOPY AND MICROANALYSIS

Ročník

12

Číslo

2

Strany od–do

1438–

Počet stran

2

BIBTEX


@article{BUT44384,
  author="Ilona {Müllerová} and Ivo {Konvalina}",
  title="Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2006",
  volume="12",
  number="2",
  pages="2",
  issn="1431-9276"
}